Have you checked the condition of the air filter, clogged airfilter can restrict the airflow to the Maf.
Good guide to diagnosing here https://www.autoblog.com/2016/03/12/p0102-obd-ii-trouble-code-mass-airflow-maf-circuit-low-voltag/?guccounter=1&guce_referrer=aHR0cHM6Ly93d3cuZ29vZ2xlLmNvbS91cmw_c2E9dCZyY3Q9aiZxPSZlc3JjPXMmc291cmNlPXdlYiZjZD0yMyZ2ZWQ9MmFoVUtFd2p0MlBqUWxiM29BaFVSblZ3S0hXNlZERmdRRmpBV2VnUUlBaEFCJnVybD1odHRwcyUzQSUyRiUyRnd3dy5hdXRvYmxvZy5jb20lMkYyMDE2JTJGMDMlMkYxMiUyRnAwMTAyLW9iZC1paS10cm91YmxlLWNvZGUtbWFzcy1haXJmbG93LW1hZi1jaXJjdWl0LWxvdy12b2x0YWclMkYmdXNnPUFPdlZhdzF0MFUySXdCNDhHVzJ2aHM5NWszdnU&guce_referrer_sig=AQAAAGVn6jzgiW7SopZfVaD-ipqbPRyDwQHsdOEm_wcMCsc5r3VJCppcKdcFDTyycJucNu8vyKODscAvU784vZGlXomSr9M0OFI1VMuNvbQhlpqQ4w-7R_jyoWmVbRq8zEusXe6ObkxTkhSf8Rfq3pY8lRgs9HEjKbKqPaQ__miU2lGC
Just noticed you say you cleaned the air filter, is it a standard filter or have you a K&N oiled filter on it, if its a K&N and too much oil has been put on it will kill the Maf. Having said that double check you have no further air leaks if you replaced the intake bellows with a new one because of a tear in the old one. Also clean out the Idle Control valve with carb cleaner, they can gum up and stick causing bad idling.
Air leaks are sometimes difficult to trace, best option is a smoke test, traced an air leak on another members 2.2 to a crack in the plastic cam cover around No4 plug well. If you have dfiagnostics capable of looking at the fuel trims have a look and see what they are doing, high fuel trims will indicate an air leak either due to leaks or misreporting Maf.